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Sapphire Wafers

Sapphire WafersSapphire Epi Polished Wafers are ultra flat, super clean, stress-free polished substrates. These are offered with precision orientations and offsets, wafer-to wafer uniformity with multiple surfaces finished. These wafers are custom designed to optimize customers’ unique specification and final application.

 

Bluebean Optical has leading capabilities in the processing and production of sapphire substrates and optical window products. Our state-of-the art facilities house high volume production equipment customized for core drilling, slicing, shaping, grinding, lapping, cleaning, annealing and measuring sapphire wafers. We also slice and grind sapphire substrates and windows with high quality surface finishes and excellent flatness specifications of bow, warp and TTV.


Sapphire Wafers Specifications:


 Constituent

Monocrystal Al2O3 with 99.999% purity

 Crystal quality

No envelope, bubble, trace, clouds, striaturn, color or scatterer

 Diameter

2 Inch

3 Inch

4 Inch

5inch 7inch

 Thickness

430±15µm

550±15µm

650±20µm

Specify

 Orientation

C- plane (0001) to M-plane (1-100) or A-plane(1 1-2 0) 0.2±0.1°

 Orientation side  length

16.0±1.0

22.0±1.0

32.5±1.5

Specify

 Orientation Incline  accuracy

A-plane (1 1-2 0 ) 0° ± 0.3°

 TTV

≤10µm

≤15µm

≤20µm

≤30µm

 BOW

≤10µm

≤15µm

≤20µm

≤30µm

 Warp

≤10µm

≤15µm

≤20µm

≤30µm

 Front Surface

Epi-Polished (Ra < 0.2nm)

 Back Surface

Fine ground (Ra = 0.5 to 1.2 µm), Epi-Polished (Ra < 0.2nm)

 Cleaning/packaging

Class 100 cleanroom cleaning, vacuum packaging removing nitrogen

 Note

Custom Specifications are also available per customer's request.