Sapphire Epi Polished Wafers are ultra flat, super clean, stress-free polished substrates. These are offered with precision orientations and offsets, wafer-to wafer uniformity with multiple surfaces finished. These wafers are custom designed to optimize customers’ unique specification and final application.
Bluebean Optical has leading capabilities in the processing and production of sapphire substrates and optical window products. Our state-of-the art facilities house high volume production equipment customized for core drilling, slicing, shaping, grinding, lapping, cleaning, annealing and measuring sapphire wafers. We also slice and grind sapphire substrates and windows with high quality surface finishes and excellent flatness specifications of bow, warp and TTV.
Sapphire Wafers Specifications:
Constituent |
Monocrystal Al2O3 with 99.999% purity |
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Crystal quality |
No envelope, bubble, trace, clouds, striaturn, color or scatterer |
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Diameter |
2 Inch |
3 Inch |
4 Inch |
5inch ~ 7inch |
Thickness |
430±15µm |
550±15µm |
650±20µm |
Specify |
Orientation |
C- plane (0001) to M-plane (1-100) or A-plane(1 1-2 0) 0.2±0.1° |
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Orientation side length |
16.0±1.0 |
22.0±1.0 |
32.5±1.5 |
Specify |
Orientation Incline accuracy |
A-plane (1 1-2 0 ) 0° ± 0.3° |
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TTV |
≤10µm |
≤15µm |
≤20µm |
≤30µm |
BOW |
≤10µm |
≤15µm |
≤20µm |
≤30µm |
Warp |
≤10µm |
≤15µm |
≤20µm |
≤30µm |
Front Surface |
Epi-Polished (Ra < 0.2nm) |
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Back Surface |
Fine ground (Ra = 0.5 to 1.2 µm), Epi-Polished (Ra < 0.2nm) |
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Cleaning/packaging |
Class 100 cleanroom cleaning, vacuum packaging removing nitrogen |
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Note |
Custom Specifications are also available per customer's request. |